Projects

Xin-Guang Silicon Tech

Polysilicon · 6.500 m² cleanroom

Services
— Fab design
— Conceptual design

Packages
— Chemical supply
— Chemical discharge
— CMP
— Ultrapure water
— Waste water treatment
— Bulk gases
— Speciality gases

Sichuan · China · 2004/05
Infineon Technologies Austria

Ultrapure water plant · 80 m³/h capacity

Services
— Design
— Tendering
— Project realization

Villach · Austria · 2006-08
Qimonda Manufacturing Singapore

300mm DRAM · 20.000 m² cleanroom

Services
— Fab design
— Conceptual design for process systems
— Awarding of general contractor

Packages
— Chemical supply
— Chemical discharge
— CMP
— Ultrapure water
— Waste water treatment
— Bulk gases
— Speciality gases

Singapore · 2007/08