Projects

Semiconductor 300

300mm DRAM · 9.740 m² cleanroom

Services
— Fab design
— Conceptual design for process systems
— Project realization
— Public approvals

Packages
— Chemical supply and discharge
— CMP
— Ultrapure water
— Waste water treatment
— Bulk and speciality gases
— Exhaust systems

Dresden · Germany · 2000/01
© ams

AMS 2000

200mm Logic · 3.170 m² cleanroom

Services
— Fab design
— Conceptual design for process systems
— Project realization

Packages
— Chemical supply
— Chemical discharge
— CMP
— Ultrapure water
— Waste water treatment
— Bulk gases
— Speciality gases

Unterpremstätten · Austria · 2001/02
Advanced Mask Technology Center

Photo Masks · 3.200 m² cleanroom

Services
— Project construction management
— Public approvals

Packages
— Chemical supply
— Chemical discharge
— CMP
— Ultrapure water
— Waste water treatment
— Bulk gases
— Speciality gases

Dresden · Germany · 2002/03